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The Science and Engineering of Microelectronic Fabrication

Campbell, Stephen A.

The Science and Engineering of Microelectronic Fabrication Author - 2nd ed. - New Delhi. : Oxford University Press, 2012 - xiv ; 603 p. PAPER BACK

Electronic & Communication

Science, engineering of Microelectronic, fabrication.

ISBN: 9780198084808

Subjects--Index Terms: Electronic.

Dewey Class. No.: 621.38152 / CAM

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