Campbell, Stephen A. <br/><br/>
The Science and Engineering of Microelectronic Fabrication 
Author 
 - 2nd ed. 
 - New Delhi. :  Oxford University Press,  2012 
 - xiv ; 603 p.  PAPER BACK 
<br/><br/> Electronic & Communication 
<br/><br/> Science, engineering of Microelectronic, fabrication. 
<br/><br/><label>ISBN: </label>9780198084808 
<br/><br/><label>Subjects--Index Terms: </label>Electronic. 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / CAM