TY  - BOOK
AU  - Campbell, Stephen A.
TI  - The Science and Engineering of Microelectronic Fabrication
SN  - 9780198084808
U1  - 621.38152 
PY  - 2012///
CY  - New Delhi.
PB  - Oxford University Press
KW  - Electronic
N1  - Electronic & Communication
N2  - Science, engineering of Microelectronic, fabrication
ER  -