Jaeger, Richard C. <br/><br/>
Introduction to Microelectronic Fabrication. 
Author. 
 - 2nd ed. 
 - New Jersey. :  Prentice Hall,  2002 
 - xiv ; 316 p.  PAPER BACK  23cm 
<br/><br/> Electronic & Communication 
<br/><br/> Microelectronic, Fabrication, introduction to Microelectronic . 
<br/><br/><label>ISBN: </label>9780201444940 
<br/><br/><label>Subjects--Index Terms: </label>Electronic. 
<br/><br/><label>Dewey Class. No.: </label>621.38173  / JAE