TY  - BOOK
AU  - Jaeger, Richard C.
TI  - Introduction to Microelectronic Fabrication
SN  - 9780201444940
U1  - 621.38173 
PY  - 2002///
CY  - New Jersey.
PB  - Prentice Hall
KW  - Electronic
N1  - Electronic & Communication
N2  - Microelectronic, Fabrication, introduction to Microelectronic
ER  -