| 000 | 00639nam a22002177a 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20160606164612.0 | ||
| 008 | 160520b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780198084808 | ||
| 040 | _aDBCETL | ||
| 041 | _aEng. | ||
| 082 |
_a621.38152 _bCAM |
||
| 100 | _aCampbell, Stephen A. | ||
| 245 |
_aThe Science and Engineering of Microelectronic Fabrication _cAuthor |
||
| 250 | _a2nd ed. | ||
| 260 |
_aNew Delhi. : _bOxford University Press, _c2012 |
||
| 300 |
_axiv ; 603 p. _bPAPER BACK |
||
| 500 | _aElectronic & Communication | ||
| 520 | _aScience, engineering of Microelectronic, fabrication. | ||
| 653 | _aElectronic. | ||
| 999 |
_c77 _d77 |
||